JPH0412814B2 - - Google Patents

Info

Publication number
JPH0412814B2
JPH0412814B2 JP60092889A JP9288985A JPH0412814B2 JP H0412814 B2 JPH0412814 B2 JP H0412814B2 JP 60092889 A JP60092889 A JP 60092889A JP 9288985 A JP9288985 A JP 9288985A JP H0412814 B2 JPH0412814 B2 JP H0412814B2
Authority
JP
Japan
Prior art keywords
voltage
output
capacitance
circuit
integrating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP60092889A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61251714A (ja
Inventor
Terutaka Hirata
Tadashi Azegami
Atsushi Kimura
Megumi Katayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP60092889A priority Critical patent/JPS61251714A/ja
Priority to US06/857,045 priority patent/US4683754A/en
Publication of JPS61251714A publication Critical patent/JPS61251714A/ja
Publication of JPH0412814B2 publication Critical patent/JPH0412814B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
    • G01L9/125—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor with temperature compensating means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
JP60092889A 1985-04-30 1985-04-30 容量式変位変換器 Granted JPS61251714A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP60092889A JPS61251714A (ja) 1985-04-30 1985-04-30 容量式変位変換器
US06/857,045 US4683754A (en) 1985-04-30 1986-04-29 Capacitive displacement transducer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60092889A JPS61251714A (ja) 1985-04-30 1985-04-30 容量式変位変換器

Publications (2)

Publication Number Publication Date
JPS61251714A JPS61251714A (ja) 1986-11-08
JPH0412814B2 true JPH0412814B2 (en]) 1992-03-05

Family

ID=14067020

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60092889A Granted JPS61251714A (ja) 1985-04-30 1985-04-30 容量式変位変換器

Country Status (2)

Country Link
US (1) US4683754A (en])
JP (1) JPS61251714A (en])

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3620399A1 (de) * 1986-06-18 1987-12-23 Philips Patentverwaltung Schaltungsanordnung zur kompensation von temperatur- und nichttemperaturbedingtem driften eines kapazitiven sensors
US4750082A (en) * 1987-10-01 1988-06-07 Pitney Bowes Inc. Capacitive ratiometric load cell
JP2570420B2 (ja) * 1988-06-23 1997-01-08 富士電機株式会社 静電容量式圧力検出器
US5194819A (en) * 1990-08-10 1993-03-16 Setra Systems, Inc. Linearized capacitance sensor system
FR2720510B1 (fr) * 1994-05-26 1996-08-02 Suisse Electronique Microtech Dispositif de mesure d'une force.
US5786698A (en) * 1996-03-07 1998-07-28 Ade Corporation Transducer Bootstrapping apparatus
US6813954B2 (en) * 2001-05-25 2004-11-09 Panametrics, Inc. High sensitivity pressure sensor with long term stability
US6476621B1 (en) 2001-06-29 2002-11-05 Ade Corporation Self-bootstrapping transducer interface
DE10134680A1 (de) * 2001-07-20 2003-02-06 Endress & Hauser Gmbh & Co Kg Schaltungsanrdnung für einen kapazitiven Sensor
US7078916B2 (en) * 2004-04-06 2006-07-18 Analog Devices, Inc. Linearity enhancement for capacitive sensors
CN1325890C (zh) * 2005-06-14 2007-07-11 浙江中控技术有限公司 电容检测电路及电容式压力变送器
US9390061B1 (en) 2012-11-16 2016-07-12 The United States Of America As Represented By The Secretary Of The Navy Environmentally compensated capacitive sensor
US9880063B2 (en) * 2013-03-13 2018-01-30 Invensense, Inc. Pressure sensor stabilization
JP6820247B2 (ja) * 2017-11-30 2021-01-27 株式会社鷺宮製作所 圧力センサのシールド構造、および、それを備える圧力センサ

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4387601A (en) * 1980-07-01 1983-06-14 Hokushin Electric Works, Ltd. Capacitance type displacement conversion device
US4467655A (en) * 1982-09-23 1984-08-28 C & J Industries, Inc. Quad-gate demodulator circuit for capacitive transducers
US4550611A (en) * 1984-01-05 1985-11-05 Motorola, Inc. Electronic pressure transducer
US4625560A (en) * 1985-05-13 1986-12-02 The Scott & Fetzer Company Capacitive digital integrated circuit pressure transducer

Also Published As

Publication number Publication date
US4683754A (en) 1987-08-04
JPS61251714A (ja) 1986-11-08

Similar Documents

Publication Publication Date Title
JPH0412814B2 (en])
US5028876A (en) Precision capacitive transducer circuits and methods
US4357834A (en) Displacement converter
JP3106805B2 (ja) 圧力差測定方法及び変位変換装置
JPH07181094A (ja) 非対称差圧トランスジューサの帰還制御方法及び装置
GB1575167A (en) Capacitance-to-voltage transformation circuit
CN101680910A (zh) 具有模拟复位的电容式微机械传感器的工作方法和电路结构
US4775830A (en) Method of and arrangement for measuring low capacitances
US5000048A (en) Circuit arrangement for temperature compensation of capacitive pressure and differential pressure sensors
US5155445A (en) Vernier voltage-to-digital converter with a storage capacitance selectable in magnitude
JPS6098328A (ja) 圧力・差圧伝送器
JPH0439893B2 (en])
JPH03233336A (ja) 圧力伝送器
KR100302459B1 (ko) 미세 거리/위치 측정용 정전 용량형 센서 콘트롤러의 비선형성 보정장치
JPS60128321A (ja) 圧力・差圧伝送器
JPS62140040A (ja) 差圧変換装置
JPS61140834A (ja) 圧力変換器
JPH0346332Y2 (en])
JPS62182619A (ja) 容量式変換装置
JPH0142237Y2 (en])
JPS60203810A (ja) 物理量変換装置
JP2004309501A (ja) 環境測定装置
JPH065189B2 (ja) 差圧変換装置
JPS60138435A (ja) 圧力・差圧伝送器
JPH0448280B2 (en])